Electromigration: Studied With The Optical Microscopy Imaging Method

Electromigration: Studied With The Optical Microscopy Imaging Method

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Electromigration is a microscopic phenomenon involving electric field-induced diffusion, which is very relevant to damage in interconnections. A common method for monitoring interconnection degradation is through electrical resistance measurements, which requires direct electrical contact. It is desirable to develop non-contact methods to monitor electromigration damage formation. In this thesis, we propose a novel Optical Microscopy Imaging Method (OMIM), and we provide a theoretical description and experimental results. OMIM not only provides a new method for studying electromigration, but also provides a useful method for studying other micro-devices and materials in a non- contact mode.

    Author

    Linghong Li

    Binding

    Paperback

    EAN

    9783639088137

    ISBN

    3639088131

    Label

    VDM Verlag

    Manufacturer

    VDM Verlag

    NumberOfPages

    76

    ProductGroup

    Book

    ProductTypeName

    ABIS_BOOK

    PublicationDate

    2008-10-10

    Publisher

    VDM Verlag

    Studio

    VDM Verlag

    Electromigration: Studied with the Optical Microscopy Imaging Method

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