Micro-Nanofabrication: Technologies And Applications

Micro-Nanofabrication: Technologies And Applications

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The book is a collection of the author’s years of experience and research findings, as well as the latest development, in micro-nanofabrication technologies. It gives a detailed introduction on the basics of micro-nanofabrication, including optical lithography, electron beam lithography, focused ion beam technique, X-ray lithography, various etching and replication techniques. For each of the fabrication technology it introduces, the emphasis is on clear explanation of the basic principle, the essential steps in the processes, various process conditions and typical process parameters. The advantages and disadvantages of each technique are also analysed. The applications of micro-nanofabrication technologies focus on manufacturing of very large scale integrated circuits (VLSI), nanoelectronics, optoelectronics, high density magnetic storage, micro-electro-mechanical system or MEMS, biochip or lab-on-chip and nanotechnology. Each of the applications is accompanied by practical examples to demonstrate how particular fabrication techniques are applied. There is an extensive list of references following each chapter for readers to explore further. The book is not only a good supplementary reading material for university undergraduates or postgraduates who are novices in this field, but also a good reference book for experienced engineering professionals who wish to know other fabrication techniques outside their own field.

  • Used Book in Good Condition
Author

Zheng Cui

Binding

Hardcover

Brand

Brand: Springer

EAN

9783540289227

Edition

2005

ISBN

3540289224

Label

Springer

Manufacturer

Springer

NumberOfPages

310

ProductGroup

Book

ProductTypeName

ABIS_BOOK

PublicationDate

2006-04-11

Publisher

Springer

Studio

Springer

Micro-Nanofabrication: Technologies and ApplicationsMicro-Nanofabrication: Technologies and Applications

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